发明名称 液体噴射ヘッドの製造方法、液体噴射ヘッド及び液体噴射装置
摘要 A method of manufacturing a liquid jet head comprises forming a terminal region on a top surface of an actuator substrate in the vicinity of a rear end thereof, and forming on the top surface a plurality of alternately arrayed ejection grooves and dummy grooves arranged in parallel to each other from a front end toward the terminal region. Shallow grooves are formed in the terminal region, and a conductive film is formed on the top surface, side surface and bottom surface of each of the ejection grooves, and on the side surface and bottom surface of the shallow grooves. The conductive film is removed from the top surface by grinding, and a cover plate is bonded to the actuator substrate so as to expose the terminal region and cover the ejection grooves. A nozzle plate is adhered to a side surface of the actuator substrate at which the ejection grooves are opened.
申请公布号 JP5891096(B2) 申请公布日期 2016.03.22
申请号 JP20120091030 申请日期 2012.04.12
申请人 エスアイアイ・プリンテック株式会社 发明人 小関 修
分类号 B41J2/16;B41J2/14 主分类号 B41J2/16
代理机构 代理人
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