发明名称 SINGLE CRYSTAL PRODUCTION METHOD
摘要 The present invention is a single crystal production method characterized by the steps of: measuring, in a state where an oven internal structure is installed on the pull chamber above the melt surface, the distance, from a reference height position at a predetermined height above the melt surface, to the lower extremity portion of the oven internal structure; determining a lower extremity portion position error, which is the difference between this measured distance and a preset distance from the reference height position to the lower extremity portion of the oven internal structure; adding this lower extremity portion position error to the distance from the reference height position to the melt surface position, thereby determining a target distance from the melt surface to the reference height position; and causing the distance from the initial position of the melt surface to the reference height position to reach the target distance, thereby adjusting the spacing so that the predetermined distance is reached. In this manner, the bath surface spacing can be adjusted to the predetermined distance, without having to provide locally inside the oven a position that needs to be precise, and even if a component of the oven internal structure has been replaced.
申请公布号 WO2016038817(A1) 申请公布日期 2016.03.17
申请号 WO2015JP04258 申请日期 2015.08.25
申请人 SHIN-ETSU HANDOTAI CO.,LTD. 发明人 TAKASHIMA, SHOU;MIYAHARA, YUUICHI;IWASAKI, ATSUSHI
分类号 C30B29/06;C30B15/20 主分类号 C30B29/06
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