A DRIVE CIRCUITRY FOR A MEMS RESONATOR

摘要

A drive loop circuitry (22) for a MEMS resonator (21). The circuitry comprises closed loop means (CSA) for detecting and amplifying a signal of the MEMS resonator (21), means (LPF) for phase shifting the detected and amplified signal, and means (DRV) for feeding the detected, amplified and phase shifted signal as a feedback signal back to the MEMS resonator (21). The means for phase shifting (LPF) the detected and amplified signal comprise a low pass filter of at least 2nd order.