发明名称 光デバイスウェーハの加工方法
摘要 <P>PROBLEM TO BE SOLVED: To improve the luminance of an optical device formed by dividing an optical device wafer. <P>SOLUTION: A dividing method of this invention includes: a depressed part formation process in which depressed parts are formed on a back surface Wb of a sapphire wafer W that a light emitting layer 412 is laminated on a surface thereof; and an optical divice wafer division process in which an optical device wafer W is divided into individual optical devices 411 along a division planned lines. Outer shape surfaces, forming various angles relative to the respective back surfaces Wb of the individual optical devices 411, are formed. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP5886524(B2) 申请公布日期 2016.03.16
申请号 JP20110001849 申请日期 2011.01.07
申请人 株式会社ディスコ 发明人 星野 仁志;岡村 卓
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
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