| 摘要 |
The method involves forming a solid thin layer (12) on a substrate (10), and printing a non-periodic geometry pattern e.g. set of identical parallel trenches, in the layer. An initial topography of the printed pattern is measured on length of the pattern. The layer is heated at measurement temperature during determined creep duration. The layer is cooled at solidification temperature of the layer, and the topography of the crept pattern is measured. A mathematical treatment is performed for the topography measurements to derive a viscosity value at the measurement temperature. |
