Apparatus for inspecting static electricity of substrate and method of manufacturing substrate

摘要

An apparatus for inspecting static electricity of a substrate includes a probe having substantially a same shape as a substrate to be inspected, the probe including a contact surface made of a conductive material, a wiring connected to the contact surface of the probe and delivering static electricity collected by the probe, and a measurement unit connected to the wiring, the measurement unit receiving the static electricity from the wiring and analyzing an intensity of the static electricity.

主权项

1. A method of manufacturing a substrate, the method comprising:
providing a probe having a sensing surface area that has substantially a same size as a substrate to be inspected, the probe including a contact surface made of a conductive material electrically connected through wiring to a measurement unit; applying a mock treatment process to the probe, the mock treatment being applied in the absence of the substrate and the probe being located at a position where the substrate is placed during a real treatment process; receiving, through the wiring, static electricity collected by the contact surface of the probe in the applying of the mock treatment process and measuring, with the measurement unit, an amount of the static electricity to provide a measured static electricity value; comparing the measured static electricity value with a reference static electricity value; determining whether the measured static electricity value is greater than the reference static electricity value; and performing a real treatment process on the substrate under process conditions of the mock treatment process when the measured static electricity value is smaller than the reference static electricity value and adjusting process conditions for the real treatment process when the measured static electricity value is greater than the reference static electricity value.