Induction heating apparatus and induction heating method

摘要

To provide an induction heating apparatus that employs a batch-type heating system for heating a large-diameter wafer and can perform uniform heating with a high precision, an induction heating apparatus (10) that heats an inductive-heating target member using a magnetic flux generated from a solenoid-type induction heating coil (18) and heats a wafer (40) using the heat generated from the inductive-heating target member, wherein a plurality of inductive-heating target members 14 (14a, 14b, and 14c) of which principal surface is arranged perpendicularly to a core axis direction of the induction heating coil (18) are interspersed. In the induction heating apparatus (10) described above, a susceptor (12) may be configured by housing the inductive-heating target member (14) in a single holder (16) made of a member having magnetic permeability and heat conductivity.

主权项

1. An induction heating apparatus, comprising:
a plurality of inductive-heating target members; a single holder housing the plurality of inductive-heating members interspersed therein; a solenoid coil operatively positioned to generate magnetic flux to heat the plurality of inductive-heating members; a single heating target operatively positioned on an upper surface of the holder to be heated by the plurality of inductive-heating members; and a power supply unit configured to adjust an electric current frequency to the solenoid coil, wherein each of the plurality of inductive-heating target members has a principal surface arranged perpendicularly to a core axis direction of the solenoid coil, the single holder having magnetic permeability and heat conductivity, each of the plurality of inductive-heating target members has a circular shape and are interspersed radially by using a center of the holder as an origin, at least one of the plurality of inductive-heating target members arranged in the center of the holder has a diameter larger than that of an inductive-heating target member arranged in the vicinity of an outer periphery side of the holder, and a portion of an inductive-heating target member is selectively heated depending on a diameter of the inductive-heating target member in response to adjusting the electric current frequency of the power supply unit.