LOADING APPARATUS, SUBSTRATE TREATING APPARATUS INCLUDING THE LOADING APPARATUS

摘要

A loading device is provided. According to an embodiment of the present invention, the loading device comprises: a supporting unit including a gripper member at the bottom to support a side of the substrate to prevent the substrate from being separated; and a loading unit placed on a lower portion of the supporting unit to load a substrate, transferred from the outside, to the supporting unit. The loading unit comprises: a base; a supporting body installed on the base to have supporting pins which support the substrate; an elevation member to lift and lower the base; and a gripper operation pin provided on the supporting body to face the gripper member and configured to operate the gripper member. The purpose of the present invention is to provide a loading unit to improve efficiency of a substrate treatment process.