ATOMIC SCALE GRID FOR MODELING SEMICONDUCTOR STRUCTURES AND FABRICATION PROCESSES

摘要

Roughly described, a system for simulating a temporal process in a body includes a meshing module to impose a grid of nodes on the body, the grid having a uniform node spacing which is less than the quantum separation distance in silicon. A system of node equations is provided, including at least one node equation for each of a plurality of nodes of the grid. The node equations describe behavior of at least one physical quantity at that node through each time step of the process. An iterating module iterates through the time steps to determine values for physical quantities of the body at the end of the simulation period. Preferably one particle of the body is assigned to each node of the grid. For moving boundary processes, boundary movement can be represented simply by changing the particle type assigned to various nodes of the grid as the boundary advances.

主权项

1. A system for simulating a temporal process in a body, the system comprising:
a processor; a memory configured to provide computer program instructions to the processor; a meshing module to impose a uniform grid of nodes on the body, the grid having three independent dimensions and having a uniform node spacing which is less than the quantum separation distance in silicon; and an iterating module for use with a provided system of node equations, including at least one node equation for each of a plurality of nodes of the grid, the node equation or equations for each particular one of the nodes describing behavior of at least one physical quantity of the body at the particular node through each of a first plurality of time steps of the process, the iterating module to iterate through the first plurality of the time steps to determine values for at least a subset of the physical quantities of the body at the end of the first plurality of time steps.