| 发明名称 |
Method of performing spectroscopy in a Transmission Charged-Particle Microscope |
| 摘要 |
A method of performing spectroscopy in a Transmission Charged-Particle Microscope comprising:
a specimen holder;a source, for producing a beam of charged particles;an illuminator, for directing said beam so as to irradiate the specimen;an imaging system, for directing a flux of charged particles transmitted through the specimen onto a spectroscopic apparatus comprising a dispersing device for dispersing said flux into an energy-resolved array of spectral sub-beams,
the method comprising:
using an adjustable aperture device to admit a first portion of said array to a detector, while blocking a second portion of said array;providing;using a radiation sensor in said flux upstream of said aperture device to perform localized radiation sensing in a selected region of said second portion of the array, simultaneous with detection of said first portion by said detector;using a sensing result from said sensor to adjust a detection result from said detector. |
| 申请公布号 |
US2016071689(A1) |
申请公布日期 |
2016.03.10 |
| 申请号 |
US201514844778 |
申请日期 |
2015.09.03 |
| 申请人 |
FEI Company |
发明人 |
de Jong Erwin Fernand;Lazar Sorin;Tiemeijer Peter Christiaan;Geurink Rudolf |
| 分类号 |
H01J37/22;H01J37/147;H01J37/20;H01J37/26;H01J37/28 |
主分类号 |
H01J37/22 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of performing spectroscopy in a Transmission Charged-Particle Microscope including:
a specimen holder, for holding a specimen; a source, for producing a beam of charged particles; a illuminator, for directing said beam so as to irradiate the specimen; a imaging system, for directing a flux of charged particles transmitted through the specimen onto a spectroscopic apparatus comprising a dispersing device for dispersing said flux into an energy-resolved array of spectral sub-beams,the method comprising:
using an adjustable aperture device to admit a first portion of said array to a detector, while blocking a second portion of said array; providing a radiation sensor in said flux upstream of said aperture device; using said sensor to perform localized radiation sensing in a selected region of said second portion of the array, simultaneous with detection of said first portion by said detector; and using a sensing result from said sensor to adjust a detection result from said detector. |
| 地址 |
Hillsboro OR US |
