SUBSTRATE CONTAINER, A LOAD PORT APPARATUS, AND A SUBSTRATE TREATING APPARATUS

摘要

A substrate container includes a housing, rack members, housing-side support members for supporting ends of substrates, a moving mechanism for moving the substrates, a lid, and lid-side support members for supporting ends of the substrates. The housing-side support members have deepest portions for supporting the ends of the substrates to be immovable upward. In a state where the lid is attached to the housing, the housing-side support members and lid-side support members clamp the ends of the substrates in between, with lower surfaces of the substrates out of contact with the rack members, and the housing-side support members support the ends of the substrates in the deepest portions. When the lid detaches from the housing, the moving mechanism moves the substrates supported in the deepest portions to disengage the ends of the substrates from the deepest portions, and places the substrates in a substantially horizontal position on the rack members.

主权项

1. A substrate container comprising:
a housing capable of accommodating substrates therein, and having an opening in a front plane thereof; rack members arranged inside the housing for contacting lower surfaces of the substrates and supporting the substrates in a substantially horizontal position; housing-side support members arranged inside the housing for supporting ends of the substrates; a moving mechanism mounted inside the housing for moving the substrates; a lid detachable from and attachable to the housing to open and close the opening: and lid-side support members attached to a rear surface of the lid for supporting ends of the substrates; wherein: the housing-side support members have binding portions for supporting the ends of the substrates to be immovable upward; in a state where the lid is attached to the housing, the housing-side support members and the lid-side support members clamp the ends of the substrates in between, with the lower surfaces of the substrates out of contact with the rack members, and the housing-side support members support the ends of the substrates in the binding portions; and when the lid detaches from the housing, the moving mechanism moves the substrates supported in the binding portions to disengage the ends of the substrates from the binding portions, and places the substrates in the substantially horizontal position on the rack members.