| 摘要 |
PROBLEM TO BE SOLVED: To correct misalignment due to overlapping other axis variation components when changing a pose of imaging means, and make effective use of pixels of the imaging means.SOLUTION: Image acquisition means 100 acquiring an image of a specimen 101 comprises: an image-formation optical system 102; an image pick-up element 33; a change mechanism that changes a pose of the specimen or the image pick-up element; a control unit 106 that calculates a control target value for arriving at a target pose; and a correction mechanism that corrects the pose thereof so that an arrival pose after the change mechanism changes the pose thereof in accordance with the control target value gets approximate to the target pose. The control unit is configured to calculate a correction value by comparing arrival image data obtained resulting from the image pick-up element photographing a correction chart 108 in which drawing information is known in a state where the pose is the arrival pose with target image data likely to be obtained when the image pick-up element photographs the correction chart in a state where the pose is the target pose, and the correction mechanism is configured to correct the pose on the basis of the correction value.SELECTED DRAWING: Figure 1 |
