SEMICONDUCTOR DEVICE WITH A PILLAR-SHAPED SEMICONDUCTOR LAYER

摘要

A semiconductor device includes a pillar-shaped silicon layer including a first diffusion layer, a channel region, and a second diffusion layer formed in that order from the silicon substrate side, floating gates respectively disposed in two symmetrical directions so as to sandwich the pillar-shaped silicon layer, and a control gate line disposed in two symmetrical directions other than the two directions so as to sandwich the pillar-shaped silicon layer. A tunnel insulating film is formed between the pillar-shaped silicon layer and each of the floating gates. The control gate line is disposed so as to surround the floating gates and the pillar-shaped silicon layer with an inter-polysilicon insulating film interposed therebetween.

主权项

1. A semiconductor device, comprising:
a pillar-shaped semiconductor layer; and floating gates arranged so as to sandwich a channel region of said pillar-shaped semiconductor layer.