发明名称 SHEET ATTACHMENT DEVICE AND ATTACHMENT METHOD
摘要 A sheet sticking apparatus includes: a feeder configured to feed an adhesive sheet; a press unit configured to press and stick the adhesive sheet to an adherend provided with a reference portion at a predetermined position; and a mark-providing unit configured to provide a predetermined position recognition mark to the adhesive sheet at a predetermined position within an area stuck to the adherend, the position recognition mark having a predetermined positional pattern relative to the reference portion.
申请公布号 US2016071751(A1) 申请公布日期 2016.03.10
申请号 US201414786156 申请日期 2014.04.11
申请人 LINTEC CORPORATION 发明人 OKAMOTO Kouji;WATANABE Kenichi
分类号 H01L21/67 主分类号 H01L21/67
代理机构 代理人
主权项 1. A sheet sticking apparatus comprising: a feeder configured to feed an adhesive sheet; a press unit configured to press and stick the adhesive sheet to an adherend provided with a reference portion at a predetermined position; and a mark-providing unit configured to provide a predetermined position recognition mark to the adhesive sheet at a predetermined position within an area stuck to the adherend, the position recognition mark having a predetermined positional pattern relative to the reference portion.
地址 Tokyo JP