METHOD OF CALCULATING A SHIFT VALE OF A CELL CONTACT

摘要

In a method of calculating a shift value of a cell contact, a reference region and a correction region may be set on an image of an actual cell block. The cell block may include a plurality of actual cell contacts formed using a mask. Each of preliminary shift values of the actual cell contacts with respect to target cell contacts in a target cell block to be formed using the mask may be measured based on the image. The preliminary shift values of the actual cell contacts in the reference region may be minimized. Actual shift values of the actual cell contacts in the correction region with respect to the minimized preliminary shift values may be calculated. Thus, the mask may be corrected using the accurately measured shift values so that the cell contacts may have designed positions.

主权项

1. A method of calculating a shift value of a cell contact, the method comprising:
demarcating a reference region from a correction region in an image of an actual cell block of a substrate where a plurality of actual cell contacts have been formed using a mask; measuring preliminary shift values of the actual cell contacts, respectively, whose images appear in the reference region of the image of the actual cell block, wherein each of the preliminary shift values represents an offset between a respective one of the actual cell contacts and a corresponding target cell contact of a target cell block, the target cell block having target cell contacts corresponding to the actual contacts, respectively; reducing the preliminary shift values of the actual cell contacts whose images appear in the reference region of the image of the actual cell block; and calculating actual shift values of the actual cell contacts in the correction region for a case in which the images of the cell contacts in the reference region are offset by the reduced preliminary shift values from the corresponding target cell contacts of the target cell block.