发明名称 PROCESSES AND SYSTEMS FOR PURIFYING SILANE
摘要 Processes and systems for purifying silane-containing streams are disclosed with relatively less silane being lost in impurity streams by use of distillation and/or condensation operations.
申请公布号 EP2993157(A2) 申请公布日期 2016.03.09
申请号 EP20150170509 申请日期 2011.09.21
申请人 MEMC ELECTRONIC MATERIALS, INC. 发明人 TRUONG, TIMOTHY DINH;GUPTA, PUNEET;GU, ZHIHUI
分类号 C01B33/04;B01D3/14 主分类号 C01B33/04
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