发明名称 |
PHOTOMULTIPLIER AND ITS MANUFACTURING METHOD |
摘要 |
The present invention relates to a photomultiplier having a structure for making it possible to easily realize high detection accuracy and fine processing, and a method of manufacturing the same. The photomultiplier comprises an enclosure having an inside kept in a vacuum state, whereas a photocathode emitting electrons in response to incident light, an electron multiplier section multiplying in a cascading manner the electron emitted from the photocathode, and an anode for taking out a secondary electron generated in the electron multiplier section are arranged in the enclosure. A part of the enclosure is constructed by a glass substrate having a flat part, whereas each of the electron multiplier section and anode is two-dimensionally arranged on the flat part in the glass substrate. |
申请公布号 |
EP2993685(A1) |
申请公布日期 |
2016.03.09 |
申请号 |
EP20150191508 |
申请日期 |
2005.02.16 |
申请人 |
HAMAMATSU PHOTONICS K. K. |
发明人 |
KYUSHIMA, HIROYUKI;SHIMOI, HIDEKI;KAGEYAMA, AKIHIRO;INOUE, KEISUKE;ITO, MASUO |
分类号 |
H01J43/24;H01J43/12;H01J43/28 |
主分类号 |
H01J43/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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