3-DIMENSIONAL VIBRATION PLATFORM STRUCTURE FOR MICROMACHINED SYSTEMS

摘要

The present invention relates to a three-dimensional vibration-proof platform structure for a microsystem. The three-dimensional vibration-proof platform structure for a microsystem comprises: a platform to which an external device is coupled; and a vibration-proof beam which is extended from the corner side surface of the platform to the outside of the platform and reduces vibration transferred to the external device, wherein one or more vibration-proof beams are prepared in a corner of the platform.