发明名称 |
THERMAL SENSOR USING A VIBRATING MEMS RESONATOR OF A CHIP INTERCONNECT LAYER |
摘要 |
Methods and apparatuses for Micro-Electro-Mechanical Systems (MEMS) resonator to monitor temperature in an integrated circuit. Fabricating the resonator in an interconnect layer provides a way to implement thermal detection means which is tolerant of manufacturing process variations. Sensor readout and control circuits can be on silicon if desired, for example, a positive feedback amplifier to form an oscillator in conjunction with the resonator and a counter to count oscillator frequency. |
申请公布号 |
EP2516977(A4) |
申请公布日期 |
2016.03.09 |
申请号 |
EP20100843435 |
申请日期 |
2010.11.30 |
申请人 |
INTEL CORPORATION |
发明人 |
ABDELMONEUM, MOHAMED A.;FISCHER, KEVIN J.;RAHAL-ARABI,, TAWFIK M.;YEOH, ANDREW;TAYLOR, GREGORY F. |
分类号 |
G01K7/32;B81B7/02;B81C1/00;G01K11/26 |
主分类号 |
G01K7/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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