| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer method of a nanostructure.SOLUTION: The transfer method of a nanostructure includes: a first step of providing a growth substrate and setting a nanostructure layer on a surface of the growth substrate; a second step of setting an adhesive layer so as to cover the nanostructure layer; a third step of moving at least one of the growth substrate and the adhesive layer to relatively separate the adhesive layer from the growth substrate and to separate the nanostructure layer from the growth substrate, thereby, exposing at least a part of the nanostructure layer from the adhesive layer; a fourth step of providing a target substrate and stacking the adhesive layer on the target substrate so as to set the nanostructure layer between the target substrate and the adhesive layer; a fifth step of setting a metal layer on an opposite surface of the adhesive layer to the surface in contact with the target substrate; and a sixth step of providing an organic solvent to permeate into the surface where the adhesive layer is in contact with the nanostructure layer, and thereby, separating the adhesive layer and the metal layer from the nanostructure layer and the target substrate. |
