Thin film transistor substrate and display

摘要

An embodiment of the invention provides a thin film transistor substrate includes: a substrate; and a plurality of transistors, wherein each of the transistors includes a gate electrode disposed on the substrate; a first diffusion barrier layer disposed on the substrate and covering an upper surface and a ring sidewall of the gate electrode; a gate insulating layer disposed on the first diffusion barrier layer; an active layer disposed on the gate insulating layer and over the gate electrode; a source electrode disposed on the substrate and electrically connected to the active layer; a drain electrode disposed on the substrate and electrically connected to the active layer; and a protective layer covering the source electrode and the drain electrode.

主权项

1. A thin film transistor substrate, comprising:
a substrate; and a plurality of thin film transistors disposed over the substrate, wherein each of the thin film transistors comprises: a gate electrode disposed on the substrate; a first diffusion barrier layer disposed on the substrate and covering the gate electrode; a gate insulating layer disposed on the first diffusion barrier layer; a metal oxide disposed on the gate insulating layer and over the gate electrode; a source electrode disposed on the substrate and electrically connected to the metal oxide; a drain electrode disposed on the substrate and electrically connected to the metal oxide, an insulating layer disposed between the metal oxide and the source electrode and disposed between the metal oxide and the drain electrode, wherein the source electrode and the drain electrode passes through the insulating layer to connect to the metal oxide, with a portion of the insulating layer exposed between the source electrode and the drain electrode; and a protective layer covering the source electrode and the drain electrode, and covering and contacting the portion of the insulating layer exposed between the source electrode and the drain electrode.