APPARATUS FOR OPTICAL EMISSION SPECTROSCOPY

摘要

The present invention relates to an optical spectrum analyzing apparatus which comprises: a light collecting unit for collecting light inside a plasma process chamber for processing a substrate by generating plasma; a light transferring unit for transferring the collected light; and an analyzing unit for analyzing a plasma status by analyzing the light provided by the light transferring unit. The light collecting unit includes a light concentrating unit for concentrating the light generated inside the plasma process chamber, and providing the light to the light transferring unit.