| 主权项 |
1. A micromechanical structure, comprising:
a substrate which has a main plane of extension; and a mass which is movable relative to the substrate, the movable mass being elastically suspended via at least one coupling spring, wherein the micromechanical structure has a first functional layer and a second functional layer, the first and second functional layers being offset relative to one another along the vertical direction in such a way that, along the vertical direction, the first functional layer is situated between the substrate and the second functional layer, and wherein the movable mass contains at least two subregions,
a first subregion of the movable mass, wherein the first subregion is at least partially situated between the substrate and the coupling spring along a vertical direction which is essentially perpendicular to the main plane of extension and wherein the first subregion is provided in the first functional layer, anda second subregion of the movable mass, wherein the second subregion of the movable mass is provided in the second functional layer. |
