发明名称 COLLIMATION EVALUATION DEVICE AND COLLIMATION EVALUATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a device capable of evaluating collimation of light with high sensitivity even if coherence length of the light is short.SOLUTION: When light enters after passing through a second reflection member 20, a first reflection member 10 partly reflects the light on a reflection surface 11, reflects light after passing through the first reflection surface 11 out of the light on a second reflection surface 12, and then emits these light in opposite directions. When the light emitted from the first reflection member 10 enters, a second reflection member 20 partly reflects the light on a first reflection surface 21, reflects light after passing through the first reflection surface 21 out of the light on a second reflection surface 22, and then emits these light. An interference fringe is formed on a screen 30 by: light Lthat is reflected on the first reflection surface 11 of the first reflection member 10 and the second reflection surface 22 of the second reflection member 20; and light Lthat is reflected on the second reflection surface 12 of the first reflection member 10 and the first reflection surface 21 of the second reflection member 20.SELECTED DRAWING: Figure 3
申请公布号 JP2016031333(A) 申请公布日期 2016.03.07
申请号 JP20140154779 申请日期 2014.07.30
申请人 HAMAMATSU PHOTONICS KK 发明人 OKUMA JUNJI;IGASAKI YASUNORI
分类号 G01J9/02;G01M11/00 主分类号 G01J9/02
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