发明名称 HIGH-PERFORMANCE LINE-FORMING OPTICAL SYSTEM AND METHOD
摘要 PROBLEM TO BE SOLVED: To provide a high-performance line-forming optical system for forming a line image, and a method therefor.SOLUTION: A method for forming a line image comprises the steps of: forming a laser beam which has a first intensity profile as well as a Gaussian distribution at least in a first direction; and forming a first transmission light by transmitting at least 50% of the laser beam in the first direction. The method further comprises the steps of: focusing the first transmission light on an intermediate image plane to define a second intensity profile having a center peak and first side peaks directly adjacent to the center peak; thereafter, defining a second transmission light by cutting away part of the second intensity profile in each first side peak; and then, forming a line image in the image plane from the second transmission light.SELECTED DRAWING: None
申请公布号 JP2016032100(A) 申请公布日期 2016.03.07
申请号 JP20150118041 申请日期 2015.06.11
申请人 ULTRATECH INC 发明人 SERGUEI ANIKITCHEV
分类号 H01L21/265;H01L21/268;H01S3/00;H01S3/10 主分类号 H01L21/265
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