发明名称 METHOD FOR FORMING CONDUCTIVE PATTERN, CONDUCTIVE PATTERN SUBSTRATE, AND TOUCH PANEL SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a method for forming a conductive pattern by which occurrence of defective disconnection between a conductive pattern and a silver paste can be inhibited even under high temperature and high humidity conditions without depending on a composition of the silver paste.SOLUTION: The method for forming a conductive pattern includes: an exposure step of irradiating a photosensitive layer that includes a photosensitive resin layer disposed on a substrate and a conductive film containing conductive fiber disposed on a surface of the photosensitive resin layer opposite to the substrate, with active rays along a pattern in the absence of oxygen; a developing step of removing an unexposed part of the photosensitive layer by use of an alkali developer to form a conductive pattern; and a cleaning step of cleaning the conductive pattern formed in the developing step by use of an acid aqueous solution containing an organic acid.SELECTED DRAWING: Figure 1
申请公布号 JP2016031503(A) 申请公布日期 2016.03.07
申请号 JP20140154939 申请日期 2014.07.30
申请人 HITACHI CHEMICAL CO LTD 发明人 EBIHARA MASAHIKO;OTA EMIKO;MURAKAMI TAIJI;YAMAZAKI HIROSHI;TANAKA HIROYUKI
分类号 G03F7/32;G03F7/004;G03F7/031;G03F7/11;G03F7/38;G06F3/041;G06F3/044 主分类号 G03F7/32
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