发明名称 |
METHOD FOR FORMING CONDUCTIVE PATTERN, CONDUCTIVE PATTERN SUBSTRATE, AND TOUCH PANEL SENSOR |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a conductive pattern by which occurrence of defective disconnection between a conductive pattern and a silver paste can be inhibited even under high temperature and high humidity conditions without depending on a composition of the silver paste.SOLUTION: The method for forming a conductive pattern includes: an exposure step of irradiating a photosensitive layer that includes a photosensitive resin layer disposed on a substrate and a conductive film containing conductive fiber disposed on a surface of the photosensitive resin layer opposite to the substrate, with active rays along a pattern in the absence of oxygen; a developing step of removing an unexposed part of the photosensitive layer by use of an alkali developer to form a conductive pattern; and a cleaning step of cleaning the conductive pattern formed in the developing step by use of an acid aqueous solution containing an organic acid.SELECTED DRAWING: Figure 1 |
申请公布号 |
JP2016031503(A) |
申请公布日期 |
2016.03.07 |
申请号 |
JP20140154939 |
申请日期 |
2014.07.30 |
申请人 |
HITACHI CHEMICAL CO LTD |
发明人 |
EBIHARA MASAHIKO;OTA EMIKO;MURAKAMI TAIJI;YAMAZAKI HIROSHI;TANAKA HIROYUKI |
分类号 |
G03F7/32;G03F7/004;G03F7/031;G03F7/11;G03F7/38;G06F3/041;G06F3/044 |
主分类号 |
G03F7/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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