METHOD AND APPARATUS FOR INSPECTING PROCESS SOLUTION, AND SAMPLE PREPARATION APPARATUS IN INSPECTION

摘要

A method for inspecting a process solution is provided. In this method, a process solution is disposed on a surface of a substrate. A liquid of the process solution is removed to form an inspection sample by a spinning method. The surface of the substrate of the inspection sample is inspected by the surface inspection device to identify whether a residue of the process solution is left on the surface of the substrate after removing the liquid of the process solution. Further, an apparatus for inspecting a process solution and a sample preparation apparatus in inspection are also provided herein.

主权项

1. A method for inspecting a process solution, comprising:
applying the process solution on a surface of a substrate; removing a liquid of the process solution by a spinning process to form an inspection sample; and identifying whether a residue of the process solution is left on the surface of the substrate by a surface inspection device.