Low Variability Robot

摘要

An apparatus including a frame, a first position sensor, a drive and a chamber. The frame has at least three members including at least two links forming a movable arm and an end effector. The end effector and the links are connected by movable joints. The end effector is configured to support a substrate thereon. The first position sensor is on the frame proximate a first one of the joints. The first position sensor is configured to sense a position of two of the members relative to each other. The drive is connected to the frame. The drive is configured to move the movable arm. The frame is located in the chamber, and the drive extends through a wall in the chamber.

主权项

1. An apparatus comprising:
a plurality of end effectors, where each end effector is configured to support a substrate thereon; a drive connected to the end effectors, where the drive comprises a first linear drive connected to a respective first one of the end effectors and a second linear drive connected to a respective second one of the end effectors; and a controller coupled to the drive, where the controller is configured to control the drive to provide a first mode of movement of the first and second end effectors including use of the first and second linear drives to move substrates at a substantially same time and independently of each other, and an alternative second mode of movement of the first end effector by the drive without moving the second end effector.