PERFORATED CONTACT ELECTRODE ON VERTICAL NANOWIRE ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a gas sensor employing a plurality of nanowires that are perpendicular to a support and having only a second end in contact with the support.SOLUTION: Each nanowire has a second end in contact with a support. An electrode contains a plurality of perforations. A method comprises: providing the support and the nanowires; depositing a layer of a filler material that covers a portion of each nanowire and leaves a first end of each nanowire exposed; depositing a plurality of nanoparticles on the filler material; depositing an electrode material on the nanoparticles, the ends of the nanowires, and any exposed filler material; and removing the nanoparticles and filler material to form an electrode in contact with the first end of each nanowire; where the electrode contains a plurality of perforations.SELECTED DRAWING: Figure 1D