| 摘要 |
The purpose of the present invention is to remove inconvenience because of selective formation of an inorganic layer by using a hard mask when an encapsulation layer, wherein organic and inorganic layers are stacked, is formed. As a solution of the inconvenience, a method for forming the encapsulation layer of an organic electroluminescent (EL) device is configured to form the encapsulation layer on a substrate (1) wherein a plurality of the organic EL devices (2) are formed, and the encapsulation layer has a structure, wherein the organic layer (11) and the inorganic layer (12) are stacked to cover an area corresponding to the organic EL device. The method comprises: a step of forming a staked layer (13) by alternately forming the organic layer (11) and the inorganic layer (12) on an entire surface of the substrate (1); a step of removing an area of the stacked layer, excepting the area (13) corresponding to the organic EL device, through dry etching; and a step of completing the encapsulation layer (16) by forming a shielding inorganic layer (15) which covers the remaining stacked layer (14) to shield side ends of the stacked layer (13) and the organic layer (12). |
