发明名称 CIRCULATING WATER PROVIDING SYSTEM AND CIRCULATING WATER PROVIDING METHOD
摘要 In one embodiment, a circulating water providing system includes a tank configured to store water, and a first pipe configured to feed the water to flow in a direction from the tank to one or more manufacturing apparatuses. The system further includes a second pipe configured to feed the water to flow in a direction from the one or more manufacturing apparatuses to the tank, and a third pipe configured to return the water from the second pipe to the tank. The system further includes a detector configured to detect a pressure of a gas in the second pipe, a valve disposed on the third pipe, and a controller configured to control an opening degree of the valve, based on the pressure of the gas detected by the detector.
申请公布号 US2016060848(A1) 申请公布日期 2016.03.03
申请号 US201514656916 申请日期 2015.03.13
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 YOSHIZU TAKASHI
分类号 E03B7/07;F24F5/00;F25D17/02;G05D16/20 主分类号 E03B7/07
代理机构 代理人
主权项 1. A circulating water providing system comprising: a tank configured to store water; a first pipe configured to feed the water to flow in a direction from the tank to one or more manufacturing apparatuses; a second pipe configured to feed the water to flow in a direction from the one or more manufacturing apparatuses to the tank; a third pipe configured to return the water from the second pipe to the tank; a detector configured to detect a pressure of a gas in the second pipe; a valve disposed on the third pipe; and a controller configured to control an opening degree of the valve, based on the pressure of the gas detected by the detector.
地址 Tokyo JP