发明名称 |
CIRCULATING WATER PROVIDING SYSTEM AND CIRCULATING WATER PROVIDING METHOD |
摘要 |
In one embodiment, a circulating water providing system includes a tank configured to store water, and a first pipe configured to feed the water to flow in a direction from the tank to one or more manufacturing apparatuses. The system further includes a second pipe configured to feed the water to flow in a direction from the one or more manufacturing apparatuses to the tank, and a third pipe configured to return the water from the second pipe to the tank. The system further includes a detector configured to detect a pressure of a gas in the second pipe, a valve disposed on the third pipe, and a controller configured to control an opening degree of the valve, based on the pressure of the gas detected by the detector. |
申请公布号 |
US2016060848(A1) |
申请公布日期 |
2016.03.03 |
申请号 |
US201514656916 |
申请日期 |
2015.03.13 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
YOSHIZU TAKASHI |
分类号 |
E03B7/07;F24F5/00;F25D17/02;G05D16/20 |
主分类号 |
E03B7/07 |
代理机构 |
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代理人 |
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主权项 |
1. A circulating water providing system comprising:
a tank configured to store water; a first pipe configured to feed the water to flow in a direction from the tank to one or more manufacturing apparatuses; a second pipe configured to feed the water to flow in a direction from the one or more manufacturing apparatuses to the tank; a third pipe configured to return the water from the second pipe to the tank; a detector configured to detect a pressure of a gas in the second pipe; a valve disposed on the third pipe; and a controller configured to control an opening degree of the valve, based on the pressure of the gas detected by the detector. |
地址 |
Tokyo JP |