Machining Head for a Laser Machining Device

摘要

The invention relates to a machining head for a laser machining device, which is equipped for machining a workpiece (24) using laser radiation (30). The laser machining head comprises an adjustable focusing optical unit (34), which focuses the laser radiation (30) in a focal spot (22). The distance between the focal spot (22) and a machining head can be modified by modifying the focal length of the focusing optical unit (34). A scanning apparatus (44) deflects the laser radiation (30) in different directions. An optical coherence tomography device (48) measures a distance between the treatment head and the workpiece (24). Here, measuring light (52), which was generated by a measuring light source (50) and reflected by the workpiece (24), interferes in the coherence tomography device (48) with measuring light, which traveled an optical path length in a reference arm (60). A path-length modulator (74) is disposed in the reference arm (60) and it updates the optical path length in the reference arm (60) synchronously with, and dependent on, a change in the focal length of the focusing optical unit (34).

主权项

1. A processing head for a laser processing device adapted for the processing of a workpiece using laser radiation, wherein the processing head comprises
adjustable focusing optics, which are adapted to focus the laser radiation in a focal spot, the distance between the focal spot and a processing head being changeable by changing the focal length of the focusing optics, an optical coherence tomograph, which is adapted to measure a distance between the processing head and the workpiece, measuring light, which has been generated by a measuring light source and reflected by the workpiece, interfering in the coherence tomograph with measuring light which has traveled an optical path length in a reference arm,wherein the reference arm includes a path length modulator which tracks the optical path length in the reference arm synchronously with and dependent on a change of the focal length of the focusing optics.