发明名称 DEVICE FOR ESTABLISHING A BONDING CONNECTION AND TRANSDUCER THEREFOR
摘要 The invention relates to a device for establishing a bonding connection, comprising a bonding head mounted so as to rotate about an axis of rotation, and a transducer (1) mounted on the bonding head, where the transducer (1) has a piezo actuator (5) for generating ultrasonic vibration, in particular a natural ultrasonic vibration, a fastening section (6) for attaching the transducer (1) to the bonding head and a tool holder (3) for a bonding tool (2), a longitudinal extension (8) of the transducer (1) and/or an extension of the same in the direction of an axis of a minimum inertial moment runs parallel to the axis of rotation of the bonding head, electrodes (20) being provided on the piezo actuator (5) in such a way that the piezo actuator (5) can be excited by an electric field in a field direction (10) transverse to a polarisation direction (9) of the piezo actuator, and as a result of the excitation and of the connection of the piezo actuator (5) to the fastening section (6) and to the tool holder (3), the piezo actuator (5) carries out a shearing motion in a shearing plane (18) formed by the polarisation direction (9) and by the field direction (10).
申请公布号 WO2016004919(A3) 申请公布日期 2016.03.03
申请号 WO2015DE100277 申请日期 2015.07.02
申请人 HESSE GMBH 发明人 HUNSTIG, MATTHIAS;BRÖKELMANN, MICHAEL
分类号 B23K20/00;B23K20/10;B23K101/42;H01L21/67;H01L23/00;H01L41/09 主分类号 B23K20/00
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