发明名称 PHOTO SENSOR AND MANUFACTURING METHOD THEREOF
摘要 A photo sensor according to an embodiment includes a semiconductor substrate. A plurality of photodiodes are provided on a first surface of the semiconductor substrate. A plurality of photodetective filters corresponding to the photodiodes are provided on a second surface of the semiconductor substrate opposite to the first surface. A plurality of lenses correspond to the photodetective filters so as to respectively cover the photodetective filters. Protruding portions protrude on the second surface between adjacent ones of the photodetective filters.
申请公布号 US2016064435(A1) 申请公布日期 2016.03.03
申请号 US201514613932 申请日期 2015.02.04
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 YABUKI Moto
分类号 H01L27/146 主分类号 H01L27/146
代理机构 代理人
主权项 1. A photo sensor comprising: a semiconductor substrate; a plurality of photodiodes on a first surface of the semiconductor substrate; a plurality of photodetective filters corresponding to the photodiodes on a second surface of the semiconductor substrate opposite to the first surface; a plurality of lenses corresponding to the photodetective filters so as to respectively cover the photodetective filters; and protruding portions protruded on the second surface between adjacent ones of the photodetective filters.
地址 Tokyo JP