发明名称 |
MAGNETIC ANNEALING APPARATUS AND MAGNETIC ANNEALING METHOD |
摘要 |
Disclosed is a magnetic annealing apparatus including a processing container that performs a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a substrate holder that holds the plurality of substrates substantially horizontally in the processing container; a division heater including a plurality of sub-division heaters and covering a substantially entire circumferential surface of an outer periphery of a predetermined region of the processing container along a longitudinal direction; a magnet installed to cover an outside of the division heater; and a controller configured to feedback-control a temperature of a predetermined control target heater among the plurality of sub-division heaters, and to control temperatures of the plurality of sub-division heaters other than the predetermined control target heater based on a control output obtained by multiplying a control output of the predetermined control target heater and a predetermined ratio. |
申请公布号 |
US2016061525(A1) |
申请公布日期 |
2016.03.03 |
申请号 |
US201514836047 |
申请日期 |
2015.08.26 |
申请人 |
Tokyo Electron Limited |
发明人 |
Yamazaki Mitsuru;Clarke Barry;Van Der Linde Jattie;Saito Makoto;Sugawara Kazuyoshi;Abe Toshiji;Enomoto Tadashi |
分类号 |
F27B17/00;H01L43/12;F27D99/00;F27D5/00;F27D7/06 |
主分类号 |
F27B17/00 |
代理机构 |
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代理人 |
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主权项 |
1. A magnetic annealing apparatus comprising:
a processing container having a horizontally-elongated tubular shape and configured to perform a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a substrate holder configured to hold the plurality of substrates substantially horizontally in the processing container such that the plurality of substrates are stacked vertically; a division heater including a plurality of sub-division heaters and configured to cover a substantially entire circumferential surface of an outer periphery of a predetermined region of the processing container along a longitudinal direction with the plurality of sub-division heaters; a magnet installed to cover an outside of the division heater; and a controller configured to feedback-control a temperature of a predetermined control target heater among the plurality of sub-division heaters, and to control temperatures of the plurality of sub-division heaters other than the predetermined control target heater based on a control output obtained by multiplying a control output of the predetermined control target heater and a predetermined ratio. |
地址 |
Tokyo JP |