摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a solar battery cell which is provided with first and second reflection preventing films and whose photoelectric conversion efficiency is improved while the rise of the manufacture cost of the solar battery cell containing a polycrystalline or single crystal Si substrate is suppressed. SOLUTION: A first reflection preventing film 15 is formed on the light- receiving face side of a polycrystalline or a single crystal Si substrate 1 by a CVD method. Then, a liquid chemical containing a dopant agent is applied to a first reflection preventing film 15 so as to form a liquid chemical layer 16. Then, the liquid chemical layer 16 is converted into a second reflection preventing layer 23 by heat-treating the substrate 1, and the dopant is diffused in surface layers 19 and 20 of the substrate 1. |