| 摘要 |
A spectroscopic sensor 1A comprises an interference filter unit 20A having a cavity layer 21 and first and second mirror layers 22, 23 and a light detection substrate 30 having a light-receiving surface 32a for receiving light transmitted through the interference filter unit 20A. The interference filter unit 20A has a first filter region 24 corresponding to the light-receiving surface 32a and a ring-shaped second filter region 25 surrounding the first filter region 24. The light detection substrate 30 has a plurality of pad units 33a contained in the second filter region 25, while the second filter region 25 is formed with through holes 6 for exposing the pad units 33a to the outside. |
