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发明名称
圧力センサおよび、それを備えるセンサユニット
摘要
When a main body of a sensor chip (1) is in a grounded state, a shield layer (71) constituting a shield electrode formed on a circuit layer (72) is grounded through a resistor (46).
申请公布号
JP5877248(B2)
申请公布日期
2016.03.02
申请号
JP20140541950
申请日期
2013.10.15
申请人
株式会社鷺宮製作所;富士電機株式会社
发明人
石川 琢郎;金井 祐二;松並 和宏
分类号
G01L9/00;G01L19/06;H01L29/84
主分类号
G01L9/00
代理机构
代理人
主权项
地址
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