发明名称 |
METHOD FOR DIVIDING BRITTLE MATERIAL SUBSTRATE, SUBSTRATE HOLDING MEMBER FOR DIVIDING BRITTLE MATERIAL SUBSTRATE, AND FRAME BODY FOR ATTACHING ADHESIVE FILM FOR USE IN DIVIDING BRITTLE MATERIAL SUBSTRATE |
摘要 |
Provided is a method which can reduce costs required for dividing a brittle material substrate, and at the same time, can not cause inconvenience in executing extension during a post process. A method for dividing a brittle material substrate comprises: a scribe line forming process of forming a scribe line at a dividing target position of one circumferential surface side of the brittle material substrate; a substrate attachment process of attaching the one circumferential surface side of the brittle material substrate formed with the scribe line to an adhesive film of a substrate support member which is formed by attaching the adhesive film to a frame body; and a dividing process of dividing the brittle material substrate by lifting down a front end of an upper blade to contact a dividing expected position of the other circumferential surface side corresponding to a forming position of the scribe line, under the state that the brittle material substrate is supported from a lower side. The frame body is in a rectangular ring shape. The length of one side of an attachable region of the brittle material substrate in the substrate supporting member is 1.2-1.4 times a maximum outer size of the brittle material substrate. |
申请公布号 |
KR20160022760(A) |
申请公布日期 |
2016.03.02 |
申请号 |
KR20150079948 |
申请日期 |
2015.06.05 |
申请人 |
MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD. |
发明人 |
MIYAKI ICHIRO;KANEHIRA YUICHI |
分类号 |
H01L21/78;H01L21/683;H01L21/76 |
主分类号 |
H01L21/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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