ヒータ素線検査方法,申请号JP20120072214-传众专利搜索

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发明名称	ヒータ素線検査方法
摘要
申请公布号	JP5876348(B2)	申请公布日期	2016.03.02
申请号	JP20120072214	申请日期	2012.03.27
申请人	東京エレクトロン株式会社;国立大学法人九州工業大学	发明人	井上久司;上茂弘志;松本俊一;佐藤寧
分类号	H05B3/00	主分类号	H05B3/00
代理机构		代理人
主权项
地址

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