| 摘要 |
A testing device (100) is disclosed for testing wafer (11) of electronic circuits, comprising a measuring head (10) provided with three functional blocks (12, 13, 14), each able to move independently from the others, to carry out different resistive measurements on a cell or wafer (11). Each of the functional blocks (12, 13, 14) supports respective measuring probes (15), suitable to be placed into contact with metallization lines or fingers (16), made on the wafers (11). |
