发明名称 液体噴射ヘッド、液体噴射装置および圧電素子
摘要 PROBLEM TO BE SOLVED: To provide a liquid ejecting head and a liquid ejecting apparatus which have piezoelectric layers hard to cause cracks and are good in reliability.SOLUTION: A liquid-ejecting head 1000 comprises a piezoelectric element 100 comprising: a first electrode 10; a piezoelectric layer 20 formed covering the first electrode 10; a second electrode 30 formed over the piezoelectric layer 20; and a coating layer 40 formed over the second electrode 30 and consisting of tungsten or titanium. The first electrode 10 and the second electrode 20 form a rectangular overlapping region 50 where the electrodes overlap each other in a plan view. The overlapping region 50 comprises a pair of first regions 51 adjacent to a pair of short sides 50b, and a second region 52 located between the pair of first regions 51 in a plan view. The coating layer 40 is formed in at least the first regions 51 avoiding the second region 52 of the overlapping region 50 in a plan view.
申请公布号 JP5874799(B2) 申请公布日期 2016.03.02
申请号 JP20140203050 申请日期 2014.10.01
申请人 セイコーエプソン株式会社 发明人 清水 稔弘;伊藤 浩;加藤 治郎;平井 栄樹
分类号 B41J2/14;H01L41/047;H01L41/053;H01L41/09 主分类号 B41J2/14
代理机构 代理人
主权项
地址