| 摘要 |
PROBLEM TO BE SOLVED: To mount linear motors with high density, while suppressing distortion of a thin mirror.SOLUTION: Between a movable part including a shaft 2 and a fixed base 4, a plurality of bias means 9 for correcting distortion of a thin mirror 1, by displacing the shaft 2 in the axial direction separately from a linear motor 6, are provided. Each bias means 9 has a bias permanent magnet 10 fixed to the end of the shaft 2 on the reverse side of the thin mirror 1, and a bias permanent electromagnet 11 fixed to the fixed base 4 on the reverse side of the thin mirror 1, while facing the bias permanent magnet 10. |
