Optically corrective microprobe for white light interferometry

摘要

The probe has a reference beam divider (20) comprising interference filters (21, 22) partially reflecting in short and long-wave spectral regions and for creating transmitted measuring light bundles (M1, M2) and associated reflected reference light bundles (R1, R2). Axial distance between the filters is adjusted so that spectrally involved optical path difference is present in equal size between the reference light bundles. A focusing lens (40) has reduced chromatic aberration so that focusing of the measuring light bundles partially overlap in a desired measuring range for an object surface. Independent claims are also included for the following: (1) an arrangement for white light interferometry (2) a method for manufacturing a dispersion-compensating reference beam divider for two spectral regions of a light beam.