| 发明名称 | Substrate treating apparatus and substrate treating method | ||
| 摘要 | Provided is an apparatus for treating a substrate using a supercritical fluid. The substrate treating apparatus includes a housing, a support member disposed within the housing to support the substrate, a supercritical fluid supply unit in which the supercritical fluid is stored, a supply tube connecting the supercritical fluid supply unit to the housing to adjust an amount of supercritical fluid supplied from the supercritical fluid supply unit into the housing, and a vent tube branched from the supply tube to discharge the supercritical fluid remaining in the supply tube. A switching valve opening or closing the vent tube is disposed in the vent tube. | ||
| 申请公布号 | US9275852(B2) | 申请公布日期 | 2016.03.01 |
| 申请号 | US201313905754 | 申请日期 | 2013.05.30 |
| 申请人 | Semes Co., Ltd. | 发明人 | Kim KiBong;Kim Boong;Song Gil Hun;Kwon Oh Jin |
| 分类号 | H01L21/00;B08B3/04;F26B5/00;H01L21/02;F26B21/14;H01L21/67;B08B7/00;F26B21/12 | 主分类号 | H01L21/00 |
| 代理机构 | Harness, Dickey & Pierce | 代理人 | Harness, Dickey & Pierce |
| 主权项 | 1. An apparatus for treating a substrate using a supercritical fluid, the apparatus comprising: a housing; a support member disposed within the housing to support the substrate; a supercritical fluid supply unit in which the supercritical fluid is stored; a supply tube connecting the supercritical fluid supply unit to the housing; and a vent tube branched from the supply tube to discharge the supercritical fluid remaining in the supply tube, wherein a supply valve adjusting an amount of supercritical fluid supplied from the supercritical fluid supply unit into the housing is disposed in the supply tube, wherein a switching valve opening or closing the vent tube is disposed in the vent tube. | ||
| 地址 | Chungcheongnam-do KR | ||