Non-spherical silica sol, process for producing the same, and composition for polishing

摘要

Provided is a non-spherical silica sol containing non-spherical silica fine particles dispersed in a dispersion medium, the non-spherical silica fine particles having an average particle diameter in a range of 3 to 150 nm as measured by dynamic light scattering, a minor-diameter/major-diameter ratio in a range of 0.01 to 0.8, and a specific surface area in a range of 10 to 800 m2/g, and also having a plurality of wart-like projections on the surfaces thereof, and a process for producing the non-spherical silica sol. The non-spherical silica fine particles contained in the non-spherical silica sol have a unique structure different from the structure of ordinary non-spherical silica fine particles.

主权项

1. A process for producing a non-spherical silica sol comprising non-spherical silica fine particles dispersed in a dispersion medium, the non-spherical silica fine particles having an average particle diameter in a range of 3 to 200 nm as measured by dynamic light scattering, a minor-diameter/major-diameter ratio in a range of 0.01 to 0.7, a specific surface area in a range of 10 to 800 m2/g, and a [SiO4/2] unit, and also having a plurality of projections on the surfaces thereof, the process comprising,
maintaining the temperature of a mixed solvent containing a water-soluble organic solvent and water in a range of 30° C. to 150° C.; simultaneously adding to the mixed solvent 1) a water-soluble organic solvent solution of a tetrafunctional silane compound represented by general formula (1) and 2) an alkali catalyst solution, wherein the simultaneous addition occurs continuously or intermittently; and after the completion of the addition, maintaining the temperature of the resulting liquid in a range of 30° C. to 150° C. so that the tetrafunctional silane compound is hydrolyzed and condensed to produce a non-spherical silica sol, wherein a molar ratio of water to the tetrafunctional silane compound is in a range of 2 to 4 throughout the addition of the tetrafunctional silane compound and alkali catalyst solution to the mixed solvent
(RO)4Si  (1) wherein in formula (1), R represents an alkyl group having 2 to 4 carbon atoms.