Carrier device and ceramic member

摘要

A ceramic member, in a carrier device, includes: a plurality of ceramic layers that have insulating properties and are integrally sintered; a clamping electrode formed on a first ceramic layer among the plurality of ceramic layers and inside of the plurality of ceramic layers, and configured to attract a dielectric material by electrostatic force; a power feed port configured to receive a supply of electric power to the clamping electrode from outside of the ceramic member; a land formed on a second ceramic layer, which is different from the first ceramic layer among the plurality of ceramic layers, and configured to receive electric power through the power feed port; and a via arranged to pass through at least one of the plurality of ceramic layers and provided as a conductive material to electrically connect the clamping electrode with the land.

主权项

1. A ceramic member configured to be movable along with a carried object in a state of holding the carried object, in a carrier device, the ceramic member comprising:
a plurality of ceramic layers laminated in a thickness direction of the ceramic member, the plurality of ceramic layers have insulating properties and are integrally sintered; a clamping electrode formed on a first ceramic layer among the plurality of ceramic layers and inside of the plurality of ceramic layers, and configured to attract a dielectric material by electrostatic force; a power feed port configured to receive a supply of electric power to the clamping electrode from outside of the ceramic member; a land formed on a second ceramic layer, which is different from the first ceramic layer among the plurality of ceramic layers, and configured to receive electric power through the power feed port; and a via arranged to pass through at least one of the plurality of ceramic layers and provided as a conductive material to electrically connect the clamping electrode with the land, said ceramic member further comprising a first opposed surface and a second opposed surface provided as uppermost surfaces along a layer surface direction of the plurality of ceramic layers and arranged to face the carried object in a state of holding the carried object, wherein the second opposed surface is located closer to the carried object than the first opposed surface, and at least part of the clamping electrode is arranged to overlap with the second opposed surface in the thickness direction perpendicular to the layer surface direction.