Vertical probe array arranged to provide space transformation

摘要

Improved probing of closely spaced contact pads is provided by an array of vertical probes having all of the probe tips aligned along a single contact line, while the probe bases are arranged in an array having two or more rows parallel to the contact line. With this arrangement of probes, the probe base thickness can be made greater than the contact pad spacing along the contact line, thereby advantageously increasing the lateral stiffness of the probes. The probe tip thickness is less than the contact pad spacing, so probes suitable for practicing the invention have a wide base section and a narrow tip section.

主权项

1. A probe array comprising:
at least two rows of probes, each probe comprising a vertical base section and a vertical tip section; said tip sections aligned along an axis parallel to said at least two rows of probes; adjacent tip sections of said probes comprising a first center to center spacing; adjacent base sections of said probes in each said row comprising a second center to center spacing; and said base sections comprising thicknesses greater than said center to center spacing of said adjacent tip sections; wherein said at least two rows are disposed on a same side of said axis so that a distance from the base sections of probes in a first row to said axis is different than a distance from the base sections of probes in a second row to said axis.