| 发明名称 |
Plasma generating device with moving carousel and method of use |
| 摘要 |
One possible embodiment of the invention could be a plasma reactor chamber and method of operating same wherein the plasma reactor chamber comprises a set of chamber walls and a door that when closed seals the plasma reactor chamber air-tight; one or more RF electrodes with at least one RF electrode being a power RF electrode; and a structure that moves one or more specimens proximate to the one or more RF electrodes. |
| 申请公布号 |
US9275835(B2) |
申请公布日期 |
2016.03.01 |
| 申请号 |
US201314089175 |
申请日期 |
2013.11.25 |
| 申请人 |
|
发明人 |
DeLarge Gregory |
| 分类号 |
H01L21/306;H01J37/32 |
主分类号 |
H01L21/306 |
| 代理机构 |
Long & Chybik |
代理人 |
Long, Esq John D.;Long & Chybik |
| 主权项 |
1. A plasma reactor chamber comprising:
(a) a set of chamber walls and a door that when closed seals the plasma reactor chamber air-tight; (b) one or more RF electrodes with at least one RF electrode being a power RF electrode, the one or more RF electrodes upon activation emits RF electromagnetic radiation; (c) a structure that moves one or more specimens proximate to the one or more RF electrodes; (d) a definite amount of polytetrafluoroethylene affixed to one of the one or more RF electrodes; wherein the emitted RF electromagnetic radiation reacts with the definite amount of polytetrafluoroethylene to emit an amount of fluorine gas amount to be used to generate a plasma field within the plasma reactor chamber. |
| 地址 |
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