发明名称 圧力センサ
摘要 A pressure sensor includes a detecting circuit configured to detect the difference between outputs from a first pressure variation sensor and a second pressure variation sensor. The first pressure variation sensor and the second pressure variation sensor have the same distance of a gap, and have frequency characteristics different from each other, that is, cutoff frequencies different from each other by setting the value of a capacity of the cavity of the first pressure variation sensor to be larger than the value of a capacity of the cavity of the second pressure variation sensor.
申请公布号 JP5867820(B2) 申请公布日期 2016.02.24
申请号 JP20120051471 申请日期 2012.03.08
申请人 セイコーインスツル株式会社 发明人 内山 武;新荻 正隆
分类号 G01L13/00;G01L9/00 主分类号 G01L13/00
代理机构 代理人
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